METHOD AND DEVICE FOR SEPARATING MEMBER

摘要

PROBLEM TO BE SOLVED: To properly separate a composite substrate independent of distortion of the composite substrate, etc. SOLUTION: The separating device is provided with a first nozzle 120A to form a wide jet stream, and a second nozzle 120B to form a narrow jet stream. When separating the outer periphery of a composite substrate 50, the jet stream formed by the first nozzle 120A is used. Then, when the inside part of the outer periphery is separated, the jet stream formed by the second nozzle 120B is used.