| 摘要 |
PROBLEM TO BE SOLVED: To provide a test device of a semiconductor device which can improve reliability of an operation test in a wafer state by utilizing BOST and BIST. SOLUTION: An operation test is performed by an external test device 1, a BIST 4 formed in a chip 2, and a BOST 3 arranged between the external test device 1 and the chip 2. A test pattern for pattern dependency test is stored in the BIST 4, and a test pattern for timing dependency test is stored in the BOST 3, and the pattern dependency test and the timing dependency test are performed by using the BOST 3 and the BIST 4.
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