MANUFACTURING METHOD OF MAGNETIC DETECTION ELEMENT

摘要

PROBLEM TO BE SOLVED: To solve the problem that a fixed magnetic layer cannot orthogonally cross a free magnetic layer easily in the conventional manufacturing method of exchange bias magnetic detection element. SOLUTION: A multiplayer film A including a first antiferromagnetic layer 12 and a fixed magnetic layer 13 is subjected to annealing in a first magnetic field while a second antiferromagnetic layer 19 is not stack, and the magnetization direction of the fixed magnetic layer is fixed in a specific direction. After that, the second antiferromagnetic layer 19 is stack, and the magnetization direction of the second antiferromagnetic layer is fixed in annealing in a second magnetic field.