| 发明名称 |
Wafer transport apparatus |
| 摘要 |
A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.
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| 申请公布号 |
US2003012624(A1) |
申请公布日期 |
2003.01.16 |
| 申请号 |
US20010905031 |
申请日期 |
2001.07.13 |
| 申请人 |
KINNARD DAVID WILLIAM;RICHARDSON DANIEL |
发明人 |
KINNARD DAVID WILLIAM;RICHARDSON DANIEL |
| 分类号 |
B25J9/06;B25J9/00;B25J9/04;B65G49/07;H01L21/677;(IPC1-7):B65G1/00 |
主分类号 |
B25J9/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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