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发明名称
Pufferschicht zum Verbessern der Schichtdickenkontrolle
摘要
申请公布号
DE69809868(D1)
申请公布日期
2003.01.16
申请号
DE1998609868
申请日期
1998.09.25
申请人
SIEMENS AG;INTERNATIONAL BUSINESS MACHINES CORP., ARMONK
发明人
GRUENING, ULRIKE;BEINTNER, JOCHEN;RADENS, CARL
分类号
H01L21/76;H01L21/308;H01L21/31;H01L21/316;H01L21/318;H01L21/763;H01L21/8242;H01L27/108;(IPC1-7):H01L21/31;H01L21/762
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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