发明名称 PROJECTION OPTICAL SYSTEM AND EXPOSURE DEVICE HAVING THE PROJECTION OPTICAL SYSTEM
摘要 <p>A projection optical system having six reflectors (CM1 to CM6) and forming the reduced image of an image on a first surface (4) on a second surface (7), comprising a first reflection imaging optical system (G1) for forming an intermediate image of the image on the first surface and a second reflection imaging optical system (G2) for forming the image of the intermediate image on the second surface, wherein the first reflection imaging optical system further comprising a pair of convex reflectors (CM2, CM3) disposed opposedly to each other.</p>
申请公布号 WO2003005097(P1) 申请公布日期 2003.01.16
申请号 JP2002005532 申请日期 2002.06.05
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