发明名称 |
Liquid crystal device, liquid crystal display panel and method for manufacturing the same |
摘要 |
A method of manufacturing a liquid crystal panel comprises the steps of forming a gate insulating film, a channel layer and an etching stopper layer on a transparent substrate bearing a gate electrode, exposing the substrate to light from its back surface side by using the gate electrode as a light shielding mask by photolithography, developing the resist, etching the etching stopper layer, forming a source/drain layer, and etching the source/drain layer and a remaining part of the etching stopper by chemical gas phase etching.
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申请公布号 |
US2003013247(A1) |
申请公布日期 |
2003.01.16 |
申请号 |
US20020234089 |
申请日期 |
2002.09.04 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
TOKUHIRO OSAMU;UEDA HIROYUKI;MACHIDA MASAHIKO |
分类号 |
G02F1/1343;G02F1/136;G02F1/1368;H01L21/336;H01L29/49;H01L29/786;(IPC1-7):H01L21/823 |
主分类号 |
G02F1/1343 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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