METHOD FOR MANUFACTURING REAR-FACIAL BURIED CONTACT SOLAR CELL

摘要

PURPOSE: A method for manufacturing a rear-facial buried contact solar cell is provided to increase the collection efficiency of carrier and to form effective rear-facial electric field by forming a contact in a deep groove. CONSTITUTION: After forming a pyramid structure on a front surface of a P-type semiconductor substrate(1), PN junction is formed by emitter diffusion. An oxide layer(5) is formed on the front and rear surface of the P-type semiconductor substrate(1). A positive groove is formed on one predetermined portion of the rear surface of the semiconductor substrate. A P+-type layer(3) is formed in the positive groove. A negative groove is formed on the other predetermined portion of the rear surface of the semiconductor substrate. An N+-type layer(2) is formed in the negative groove. A bottom electrode(4) is formed in the positive and negative groove by plating a conductive metal.