| 摘要 |
The present invention relates to a apparatus for measuring 6-degree-of-freedom motions of a rigid body by using a three-facet mirror wherein the measurement of the 6-degree-of-freedom displacements of an object, particularly an object in motion with a high-speed, can be made with ease and with accuracy, and specially the measuring precision is excellent. According to the invention there is proposed an apparatus for measuring six-degree-of-freedom motions by using three-facet reflector, the six-degree-of-freedom motions of an object being measured by using the laser beam proceeding from a laser light source, comprising: a multiple facet reflector in the form of a trigonal pyramid, the multiple facet reflector being fixed on the object for measurement and able to reflect the laser beam in three directions; three position-sensitive detectors for measuring the position and intensity of the laser light points formed on their surfaces, with the movement of the multiple facet reflecotor, and then providing output signals; and a controlling section for analyzing six-degree-of-freedom motions of the multiple facet reflector by using the position and intensity of the laser light points output from the three position-sensitive detectors. (FIG. 4).
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