发明名称 |
Apparatus and method for focusing light beam and exposure apparatus |
摘要 |
Focusing method and exposure apparatus for focusing both a parallel light beam and a non-parallel light beam through a movable objective lens onto an object. A negative feedback loop is provided which has a detector for receiving a reflection light beam of the non-parallel light beam passed through the movable objective lens, reflected at the object and passed through the movable objective lens, for generating a detection signal corresponding to a focus deviation of the non-parallel light beam, and a driver for receiving the detection signal to control a position of the movable objective lens in accordance with the detection signal, so that the detection signal is decreased. The negative feedback loop further includes a correction signal generator for generating a correction signal and supplying it to the negative feedback loop as a disturbance of the loop so that the parallel light beam is focused onto the object.
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申请公布号 |
US2003012094(A1) |
申请公布日期 |
2003.01.16 |
申请号 |
US20010024725 |
申请日期 |
2001.12.21 |
申请人 |
YANAGI MASASHI;ANDOU TETSUO;KIMURA NOBUO;NAKAMOTO HIDEKAZU |
发明人 |
YANAGI MASASHI;ANDOU TETSUO;KIMURA NOBUO;NAKAMOTO HIDEKAZU |
分类号 |
G11B7/09;G11B7/00;G11B7/095;G11B7/125;G11B7/26;(IPC1-7):G11B7/095 |
主分类号 |
G11B7/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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