Verfahren und Vorrichtung zum Herstellen laminierter dünnen Schichten,申请号DE19986006281T-传众专利搜索

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发明名称	Verfahren und Vorrichtung zum Herstellen laminierter dünnen Schichten
摘要
申请公布号	DE69806281(T2)	申请公布日期	2003.01.16
申请号	DE19986006281T	申请日期	1998.03.04
申请人	TOKYO ELECTRON LTD., TOKIO/TOKYO	发明人	HASHIMOTO, TSUYOSHI;MATSUSE, KIMIHIRO;OKUBO, KAZUYA;TAKAHASHI, TSUYOSHI
分类号	H01L21/28;C23C16/44;C23C16/455;H01L21/205;H01L29/423;H01L29/43;H01L29/49;H01L29/78;(IPC1-7):C23C16/44;H01L21/285	主分类号	H01L21/28
代理机构		代理人
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