PROJECTION OPTICAL SYSTEM AND EXPOSURE DEVICE HAVING THE PROJECTION OPTICAL SYSTEM

摘要

A projection optical system having six reflectors (CM1 to CM6) and forming the reduced image of an image on a first surface (4) on a second surface (7), comprising a first reflection imaging optical system (G1) for forming an intermediate image of the image on the first surface and a second reflection imaging optical system (G2) for forming the image of the intermediate image on the second surface, wherein the first reflection imaging optical system further comprising a pair of convex reflectors (CM2, CM3) disposed opposedly to each other.