| 摘要 |
An apparatus for transferring a front opener unified pod (FOUP) door for a FOUP opener, in which a protection cover is provided to prevent an inflow of particles through a belt when a separated FOUP door moves up and down, or a lifter having an improved structure employing a ball screw mode and a door holder slider which is driven by a rack/pinion gear operated by a driving motor mounted thereon are provided. The FOUP door transfer apparatus for a FOUP opener includes: a door holder slider having a fixed plate provided with a rack gear at a predetermined position and a sliding plate on the upper portion of which a pinion gear door holder teeth-engaged with the rack gear of the fixed plate and moving along the rack gear; and a lifter including driving pulleys fixed on the upper and lower ends of a lift frame, a driving motor driving the driving pulleys, a driving belt connecting the driving pulleys and on one side of which a transfer piece is fixed, and the transfer piece on one end of which the driving belt is fixed and on the other end of which the support is connected, a lift frame accommodating the driving belt, and having an opening through which the transfer piece goes in and out, and a pair of left and right attachment pieces positioned in a lengthy direction along both ends of the opening, and a shield plate attached to the attachment pieces, shielding the opening of the lift frame from the outside.
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