发明名称 |
METHOD FOR MANUFACTURING PRINTED WIRING BOARD |
摘要 |
A method for manufacturing a very−thin printed wiring board a plurality of which can be stacked, characterized by comprising the steps: A. preparing a silicon wafer (20) having a thickness of 50 to 300 µm; B. attaching the silicon wafer (20) to a jig (10) for holding only the edge of the silicon wafer (20), covering the whole surface of the silicon wafer (20) with a film, and fixing the silicon wafer (20) to the jig (10); C. patterning the film to expose the front and back faces of the silicon wafer (20); D. making a through hole in a predetermined position of the exposed silicon wafer (20), and forming a metallic thin film on the exposed surface of the silicon wafer (20) having the through hole; and E. patterning the metallic thin film, and performing etching so as to produce a predetermined conductor pattern.
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申请公布号 |
WO03005786(A1) |
申请公布日期 |
2003.01.16 |
申请号 |
WO2002JP06711 |
申请日期 |
2002.07.03 |
申请人 |
MEJIRO OPTICA INC.;UEHARA, MAKOTO |
发明人 |
UEHARA, MAKOTO |
分类号 |
H01L21/48;H01L21/687;H05K1/03;(IPC1-7):H05K3/06;H01L21/320;H01L21/68;H05K3/18;H05K3/24 |
主分类号 |
H01L21/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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