| 摘要 |
This invention is to inhibit people other than a specific person from browsing information in a semiconductor manufacturing system. The user of a semiconductor manufacturing apparatus (e.g., an exposure system) encrypts, using a public key (5), confidential information (4) which should be kept secret to the vendor and stores the information in a memory (40). The user can decrypt the encrypted confidential information (4) using a private key (6). The user can also provide a private key (7) to the vendor, as needed.
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