发明名称 |
Thin wafer carrier |
摘要 |
A wafer carrier for carrying a plurality of axially aligned thin circular wafers. The wafer carrier has a framework portion formed from a pair of end members connected by a plurality of side support members. A pair of opposing sidewall assemblies is positioned between the pair of end members, and is attached to at least one side support member. Each sidewall assembly has a plurality of shelves defining a plurality of slots for receiving a wafer. The sidewall assemblies are formed from a plurality of stacked together individual shelf members. Each shelf member has a body portion with an upper surface and a lower surface. The lower surface has a plurality of pegs which are positioned to be received by a plurality of apertures formed in the upper surface of an immediately adjacent individual shelf member.
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申请公布号 |
US2003010672(A1) |
申请公布日期 |
2003.01.16 |
申请号 |
US20020194981 |
申请日期 |
2002.07.11 |
申请人 |
SIMPSON ANTHONY;WISEMAN BRIAN |
发明人 |
SIMPSON ANTHONY;WISEMAN BRIAN |
分类号 |
B65D85/86;H01L21/673;(IPC1-7):B65D85/58 |
主分类号 |
B65D85/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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