发明名称 |
COMBINATION DIFFERENTIAL AND ABSOLUTE PRESSURE TRANSDUCER FOR LOAD LOCK CONTROL |
摘要 |
Transducer apparatus and method combining both an absolute pressure sensor for sensing absolute pressure in the load lock chamber and a differential pressure sensor for sensing a pressure difference between ambient atmospheric pressure and pressure in a load lock chamber and provides control signals for opening an interior door from the load lock chamber into a vacuum processing chamber and for opening an exterior door between ambient atmosphere and the load lock chamber. The transducer can also produce signals to control transition from slow to fast vacuum pump-down of load lock chamber pressure at a predetermined pressure set point.
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申请公布号 |
US2003010129(A1) |
申请公布日期 |
2003.01.16 |
申请号 |
US20010907541 |
申请日期 |
2001.07.16 |
申请人 |
GU YOUFAN;HOLCOMB GARRY;WENZEL OLE |
发明人 |
GU YOUFAN;HOLCOMB GARRY;WENZEL OLE |
分类号 |
G01L9/00;G01L21/12;(IPC1-7):G01L13/02 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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