FUNCTIONAL FILM AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a functional thin film having high gas barrier properties even made of a low cost film having rough surface properties in a gas barrier film, a vacuum heat insulation material, excellent mass productivity and high reliability and to provide a method for manufacturing the same. SOLUTION: The low cost functional thin film comprises a metal film or a metal oxide film and an amorphous carbon film formed on at least one side surface of a polymer film. Thus, the gas barrier properties are improved with high reliability. The method for manufacturing the same is also provided.