发明名称 DEVICE FOR GENERATING AIR CURTAIN OF EQUIPMENT FOR REMOVING PHOTORESIST FOR FABRICATING LCD
摘要 PURPOSE: An air curtain generating device for a photoresist removing equipment for fabricating a liquid crystal display device is provided to form an air curtain to a path of a work room to prevent the introduction of chemicals into the path and spray the chemicals onto a top surface of a substrate passing through the path to prevent the generation of impurities by rapid solidification. CONSTITUTION: An air curtain generating device for a photoresist removing equipment for fabricating a liquid crystal display device, including a spraying head(21) disposed inside and outside outlet parts of a third separation chamber and a rinse chamber for spraying air, and air supply tubes(22) for supplying air into the spraying heads, includes a nozzle tube(102) disposed in each of the spraying heads and formed with a plurality of nozzle holes(102a), and a chemical supplying tube(103) for supplying chemicals into the nozzle tube.
申请公布号 KR20030004511(A) 申请公布日期 2003.01.15
申请号 KR20010040014 申请日期 2001.07.05
申请人 LG.PHILIPS LCD CO., LTD. 发明人 NA, JIN WON;OH, SE CHEOL
分类号 G02F1/13;(IPC1-7):G02F1/13 主分类号 G02F1/13
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