| 摘要 |
<p>An X-Y stage includes a coarse movement stage (300) provided to a surface plate to move an intermediate plate (120), and a fine movement stage (100) provided on the intermediate plate to finely move a top plate (101). The coarse movement stage has an X driving linear motor and Y driving linear motor for respectively moving X and Y sliders with respect to a base surface plate. The fine movement stage has a fine driving linear motor that connects the intermediate plate and a fine movement table. The fine movement table has an electromagnetic coupling (200) provided between the intermediate plate and the top plate to apply an accelerating force to the top plate in accordance with accelerat</p> |
