SYSTEM FOR CARRYING LIQUID REAGENT AND PROCESSING METHOD THEREBY

摘要

PURPOSE: A liquid reagent delivery system and a process method are provided to stabilize the system by installing a bypass pump in a bypass pipe, and to increase the productivity by actuating the transporting system individually. CONSTITUTION: A liquid reagent delivery system is composed of a carburetor(32) evaporating liquid reagent; a gas supply pipe(30) connecting the carburetor to a reactor to supply gas to a process chamber(10); a gas supply valve regulating flow of gas; a bypass pipe(40) connected to the carburetor to discharge gas from the carburetor; a bypass pump(42) connected to the bypass pipe; and a bypass valve installed in the bypass pipe to regulate gas flow. The productivity is increased by actuating the delivery system individually with installing the bypass pump in the bypass pipe.