| 摘要 |
<p>PROBLEM TO BE SOLVED: To avoid necessity of moving a sample and an X-ray source and make one kind of multilayer film mirror enough, when performing an X-ray spectro scope, while switching two kinds of wavelengths. SOLUTION: A multifocus type X-ray source is used. From a first focal point F1, X-ray of a first wavelength is generated, and from a second focal point F2, X-ray of a second wavelength is generated. The first focal point F1 and the second focal point F2 are at different positions seeing from the drawing direction of X-ray. The curvature of a multilayer mirror 50 is made variable. For taking out the first wavelength as a parallel X-ray beam, the reflection surface of the multilayer film mirror 50 is bent to be along the first parabola 48 and the first focal point F1 of the X-ray source is arranged at the focal position. For taking out the second wavelength, the reflection surface of the multilayer film mirror 50 is bent to be along the second parabola 52 and the second focal point F2 of the X-ray source is arranged at the focal position. In the above spectrum step of the two kinds, the position and posture of the X-ray source are the same and so that reflection mirror position of the multilayer film mirror 50 does not practically change and only its posture and curvature change.</p> |
