| 摘要 |
PROBLEM TO BE SOLVED: To provide an evacuation method and an evacuation device capable of providing high vacuum without contaminating inside of a vacuum tank. SOLUTION: Inside of the vacuum tank 10 is primarily evacuated from an atmospheric pressure condition by a vacuum pump 22 connected to the vacuum tank 10. The inside of the vacuum vessel is secondarily evacuated by opening an open and close type vessel and making a getter film expose to inside of the vacuum vessel to adsorb gas in the vacuum vessel after the getter stored in an open and close type vessel 34 arranged in the primarily evacuated vacuum tank is scattered with a the open and close type vessel 34 closed to form getter film on inner surface of the open and close type vessel, and by irradiating electron beam from a electron generator 90 into the vacuum tank to ionize gas in the vacuum tank and to create an electric field in the open and close type vessel for absorbing ionized gas.
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