| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room temperature sensor apparatus. SOLUTION: The clean room temperature sensor apparatus is provided with a housing 30, a sheath pipe 40 that projects from the outer-periphery surface of the housing 30 while a vertical end is open, a lead wire protection pipe 50 that is located inside the sheath pipe 40, has a smaller outer diameter than the inner diameter of the sheath pipe 40, and projects from the outer-periphery surface of the housing 30, and a cylindrical temperature sensor 60 whose fixed end 62 is detachably connected to the vertical end of the lead wire protection pipe 50 inside the sheath pipe 40, allows a plurality of lead wires 66 withdrawn from the fixed end 62 to be extended into the housing 30 through the inside of the lead wire protection pipe 50, and whose temperature sensor element is exposed to the inside of a free end 64. Since the temperature sensor element is present inside the sheath pipe 40 while being exposed to the atmosphere, the temperature sensor element can sensitively detect the change in the atmospheric temperature in a clean room, and can improve the temperature response characteristics of a clean room temperature control apparatus.
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