SINGLE CRYSTAL PULLING APPARATUS, ITS METHOD AND PROGRAM AND RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To adequately control the operation for growing a semiconductor single crystal by the Czochralski method by precisely determining the geographical shape of a growing semiconductor single crystal from the image of the boundary of the crystal and the melt. SOLUTION: An original image of a single crystal pulling apparatus 10 captured by a camera 18 is read from a storage unit 19, and a converted image representing a virtual image viewed from the direction parallel with the pulling shaft P is created from the data. Information regarding the geographical shape of the semiconductor crystal S such as the diameter R and the position of the center C is obtained by means of an image processing unit 20. A control unit 21 controls the heater 15, the pulling apparatus 16 and the crucible lifting device 17 based on the information obtained.