HIGH PERFORMANCE HORIZONTAL DIFFUSION FURNACE SYSTEM,申请号EP19930916481-传众专利搜索

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发明名称	HIGH PERFORMANCE HORIZONTAL DIFFUSION FURNACE SYSTEM
摘要
申请公布号	EP0645072(B1)	申请公布日期	2003.01.15
申请号	EP19930916481	申请日期	1993.06.09
申请人	THERMTEC, INC.	发明人	PECK, KEVIN, B.;ERICKSON, RONALD, E.;MATTHEWS, STEPHEN, H.
分类号	F27D1/00;C30B31/10;F27B5/04;F27B5/14;F27D7/06;F27D21/00;H01L21/00;H01L21/22;H01L21/31;(IPC1-7):H05B3/10;H05B3/64;F27B5/00;C23C16/00;F27D3/00;C30B31/12	主分类号	F27D1/00
代理机构		代理人
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地址

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