| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow sensor which can improve the adhesiveness of a flow rate detecting resistance film to its base of an insulation film to adequately suppress the resistance film from peeling off a substrate. SOLUTION: In the flow sensor provided with a semiconductor substrate 1, lower insulation films 11, 12 formed on one side of the substrate 1, flow rate detecting resistance films 20, 30, 40 formed on the insulation films 11, 12, and a top insulator film 13, 14 formed on the resistance films 20-40, the resistance films 20-40 are made of Pt and at least adhered to the lower insulation film 12 through an adhesive layer 50 made of Ti.</p> |
