| 摘要 |
PROBLEM TO BE SOLVED: To provide pneumatic equipment using a diaphragm capable of substantially providing an equivalent function of using a molded diaphragm while using flat plate shape diaphragm. SOLUTION: This pneumatic equipment with a diaphragm has annular wrinkles intentionally created on the inside of a circumference edge clamped part of a flat plate round shaped diaphragm to give degree of freedom for deformation and provides a substantially equivalent function to pneumatic equipment with a molded diaphragm.
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