发明名称 METHOD FOR PRODUCING CONDUCTOR TRACK STRUCTURES, ESPECIALLY FINE CONDUCTOR TRACK STRUCTURES, ARRANGED ON A NONCONDUCTIVE SUPPORT MATERIAL
摘要 Conductor track structures arranged on a nonconductive support material, especially fine conductor track structures, composed of a heavy-metal base and a metallization layer applied to the base, and a method for producing the conductor track structures. The heavy-metal base contains heavy metal nuclei which are formed by breaking down a nonconductive heavy metal complex by using UV radiation produced by an excimer laser. The heavy metal complex is applied to the entire microporous surface of the support material and covers the surface of the support material in the area of the conductor track structures. Conductor track structures produced according to the invention are comparatively easier to produce than previously known conductor track structures and exhibit very good adhesion.
申请公布号 EP0917597(B1) 申请公布日期 2003.01.15
申请号 EP19980937438 申请日期 1998.06.03
申请人 LPKF LASER & ELECTRONICS AG 发明人 NAUNDORF, GERHARD, PROF. DR.;WISSBROCK, HORST, PROF. DR.
分类号 H05K1/09;C23C18/00;C23C18/14;C23C18/16;H01L21/3205;H01L23/52;H05K3/18;H05K3/38;(IPC1-7):C23C18/00 主分类号 H05K1/09
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