| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact interferometer capable of forming a strict common optical path even in measurements of both a transmitted wave front and a surface shape. SOLUTION: In this point diffraction interferometer, a luminous flux from a light source is divided into two or more luminous fluxes by a luminous flux dividing means, and converged to different positions by a condenser lens, and only two luminous fluxes of the divided luminous fluxes are transmitted by a pinhole plate provided with two pinholes and arranged on the focal plane of the condenser lens, and then interfered to each other. This interferometer is characterized in that the luminous fluxes are transmitted or reflected by a lens of a subject and then transmitted again by the pinhole plate from the reverse direction.
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