| 摘要 |
PROBLEM TO BE SOLVED: To provide a position sensor dispensing with precise parts, assembly and temperature compensation, capable of acquiring sufficient linearity of an output to displacement. SOLUTION: This sensor is equipped with a housing 7, a flat fixed electrode 10 fixed on the housing 7, a flat movable electrode 20 having the parallel surface opposite to the upper surface of the fixed electrode 10, displaced relatively in the X direction to the housing 7 and the fixed electrode 10, and having the overlapped area (overlapped area viewed from the Z direction) with the fixed electrode 10 in the surface direction changing corresponding to the displacement quantity, a dielectric plate 30 fixed to the fixed electrode 10 between the upper surface of the fixed electrode 10 and the under surface of the movable electrode 20 facing mutually, and a sensor circuit 4 for outputting an electric signal for showing position information between the fixed electrode 10 and the movable electrode 20 corresponding to a capacitance C formed by the fixed electrode 10, the movable electrode 20 and the dielectric plate 30. The fixed electrode 10 and the movable electrode 20 are electrically connected to the sensor circuit 4.
|
