发明名称 LENS WASHING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a lens washing method by use of a compact device used for washing a lens and capable of satisfying transmittance characteristic of the lens in an ultraviolet ray region having short wavelength without using a solvent. SOLUTION: When the lens 3 is washed in this method, pollutant is removed from a surface of the lens 3 treated by the irradiation of high energy light from an excimer laser light source 1, then UV/O3 treatment is further applied to the surface of the lens 3 to remove the pollutant from the surface of the lens 3 while maintaining a crystal structure of the surface of the lens 3, and the energy due to the irradiation of high energy light is in a scope in which a crystal structure of a lens material is maintained.
申请公布号 JP2003011046(A) 申请公布日期 2003.01.15
申请号 JP20010199982 申请日期 2001.06.29
申请人 CANON INC 发明人 SUZUKI HIROYUKI;KAMEYAMA MAKOTO
分类号 G02B1/10;B08B7/00;B24B13/005;G02B1/02;(IPC1-7):B24B13/005 主分类号 G02B1/10
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