| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for quantitatively analyzing an element with a small error in which a quantitative determination error due to a deviation of an ion irradiating content based on a sample current is corrected. SOLUTION: The method for quantitatively analyzing the element comprises the steps of irradiating a standard sample and a sample (3) to be analyzed with an ion (5), and quantitatively determining a target element in the sample to be analyzed based on a ratio of the standard sample to the sample to be analyzed of a spectral yield to be detected by a detector (DB) according to a nuclear reaction or the ion with a target element or an elastic recoil scattering. In this case, the quantitative determination error due to the deviation of the ion irradiating content to the standard sample and the sample to be analyzed is corrected by using a ratio of the standard sample to the sample to be analyzed of a back scattering spectral yield at the time of irradiating with the ion to be detected by the detector (DA).</p> |
