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发明名称
Free-standing rotating evaporation source
摘要
申请公布号
EP0887435(B1)
申请公布日期
2003.01.15
申请号
EP19980304861
申请日期
1998.06.19
申请人
THE BOC GROUP, INC.
发明人
HILL, RUSSEL J.;SMITH, P.A. JOEL;CHANG, PING
分类号
C23C14/24;C23C14/30;(IPC1-7):C23C14/30
主分类号
C23C14/24
代理机构
代理人
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