| 摘要 |
PROBLEM TO BE SOLVED: To provide a creation method in which reference data about a conductor pattern is created in a short time and with satisfactory efficiency. SOLUTION: In the creation method in which the reference data used to inspect the conductor pattern is created, a selection process (Step 21) in which the conductor pattern is selected, a measuring process (Step 22) in which the interelectrode capacitance of the selected conductor pattern is measured, and a disconnection or short-circuit inspection process (Steps 23, 25) in which its disconnection or short circuit is detected, are executed repeatedly with reference to each conductor pattern until and interelectrode capacitance regarding a normal conductor pattern is measured. A calculation process (Step 28) in which an interelectrode capacitance per unit area regarding the conductor pattern is calculated on the basis of the interelectrode capacitance regarding the measured normal conductor pattern and on the basis of area information on each conductor pattern is executed, and the area of each conductor pattern is multiplied by the interelectrode capacitance per unit area so as to be found. On the basis of a first reference capacitance, the reference data regarding each conductor pattern is created.
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