发明名称 LENS INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To obtain a lens inspection device capable of reducing the luminous intensity of illumination light to an object to be inspected to realize stable inspection. SOLUTION: In the lens inspection device having a laser beam source and an image pickup element and inspecting a lens of an object to be inspected, a rotary symmetric lens system having positive power and a deflector for rotating the reflecting direction of incident light to make the same variable are provided. The lens system is characterized in that it forms a focus in the vicinity of the reflecting surface of the deflector using the beam from the laser beam source, the deflector reflects the light from the lens system while rotating the same to apply scanning illumination to the object to be inspected, and projects the transmitted beam from the object to be inspected on a screen and the beam from the screen is received by the image pickup element.
申请公布号 JP2003014578(A) 申请公布日期 2003.01.15
申请号 JP20010198745 申请日期 2001.06.29
申请人 CANON INC 发明人 NISHIWAKI MASAYUKI
分类号 G01B11/30;G01M11/00;G01N21/958;G02B26/02;G02B26/10;(IPC1-7):G01M11/00 主分类号 G01B11/30
代理机构 代理人
主权项
地址