| 发明名称 |
CERAMIC HEATER |
| 摘要 |
The invention provides a ceramic heater that makes the temperature of a ceramic substrate uniform by suppressing the transfer of heat from the ceramic heater to a housing. The ceramic heater includes a heater formed on or under the surface of a ceramic substrate, and the surface roughness on the side of the ceramic substrate is JIS B 0601 Rmax=0.1-200 mu m. |
| 申请公布号 |
EP1185145(A4) |
申请公布日期 |
2003.01.15 |
| 申请号 |
EP20000948352 |
申请日期 |
2000.08.01 |
| 申请人 |
IBIDEN CO., LTD. |
发明人 |
ITO, YASUTAKA;HIRAMATSU, YASUJI |
| 分类号 |
H05B3/20;H01L21/00;H01L21/027;H05B3/10;H05B3/14;H05B3/16;H05B3/26;H05B3/28;H05B3/68;H05B3/74 |
主分类号 |
H05B3/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
