发明名称 INSPECTING DEVICE, RECORDING MEDIUM WITH PROGRAM RECORDED THEREON AND PROGRAM
摘要 PROBLEM TO BE SOLVED: To easily and quickly start inspection based on a desired inspection condition concerning an inspecting device whose inspection conditions can be changed by changing components, a recording medium on which a program for realizing control over the inspecting device with a computer is recorded and a program for realizing control over the inspecting device with the computer. SOLUTION: Desired component ID information showing a component preselected by a user in order to realize a desired inspection condition is recorded, current component ID information showing components constituting the current inspecting device is acquired, the desired component ID information is compared with the current component ID information, and if there is a difference between the components, the difference is displayed.
申请公布号 JP2003015055(A) 申请公布日期 2003.01.15
申请号 JP20010197001 申请日期 2001.06.28
申请人 NIKON CORP 发明人 MANO SHIGEYUKI
分类号 G02B21/36;(IPC1-7):G02B21/36 主分类号 G02B21/36
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