| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming an image by a transmission electron microscope of a sample having a laminated structure made of two or more layers capable of forming the image, in which two adjacent layers of the sample in which one or more of the layers are single crystal layers can be clearly distinguished, and to provide a method for measuring a thickness of the layer using the image and a method for confirming a laminated state to conduct by using the image. SOLUTION: In the method for forming the image by the transmission electron microscope of the sample having the laminated structure made of the two or more layers in which one or more layers are single crystal layers, an angle of any single crystal layer displaced from a zone axis of any single crystal layer in a range of the image is set to an incident angle of an electron beam, and a transmitted wave passed through the sample is utilized. The method for measuring the thickness of the layer of the sample comprises a step of measuring the thickness of the image of the method for forming the image. The method for confirming the laminated state comprises a step of confirming the laminated state by using the image of the method for forming the image.
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