发明名称 |
MOLDED FLUOROELASTOMER WITH EXCELLENT DETACHABILITY AND PROCESS FOR PRODUCING THE SAME |
摘要 |
<p>There is provided a fluorine-containing elastomer molded article which is obtained by irradiating the fluorine-containing elastomer molded article with a plasma and has a center line average roughness of not less than 0.65 mu m or a fluorine-containing elastomer molded article which is obtained by applying a resin coating layer on a fluorine-containing elastomer substrate, has a small peeling strength and a small etching rate at the irradiation of plasma and is excellent in detachability and whiteness. There is provided particularly a molded article suitable as various sealing materials for semiconductor production apparatuses.</p> |
申请公布号 |
EP1275683(A1) |
申请公布日期 |
2003.01.15 |
申请号 |
EP20010921900 |
申请日期 |
2001.04.19 |
申请人 |
DAIKIN INDUSTRIES, LTD. |
发明人 |
YAMATO, TAKAFUMI;HIGASHINO, KATSUHIKO;TANAKA, HIROYUKI;NOGUCHI, TSUYOSHI;KISHINE, MITSURU |
分类号 |
C08J3/28;B32B1/00;C08J5/00;C08J7/00;C08J7/04;C08K3/22;(IPC1-7):C08J7/00 |
主分类号 |
C08J3/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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