APPARATUS FOR MONITORING DC MOTOR OFFSET OF WAFER HANDLER

摘要

PURPOSE: An apparatus for monitoring a DC motor offset of a wafer handler is provided to prevent the scrap of wafer during a process of ion implantation by monitoring the status of a zero offset to drive a motor by being identified by a user. CONSTITUTION: An apparatus for monitoring a DC motor offset of a wafer handler includes a motion control board(10) installed in a wafer handler controller(100) for driving the servo motor by outputting a servo analog output voltage, a first analog/digital(A/D) converter(18) for converting the servo analog output voltage outputted from a pair of terminals of the motion control board(10) into a digital signal and a first liquid crystal display(LCD) driving block(22) for displaying the servo analog output voltage to a first display block(26) by receiving the servo analog output voltage converted into the digital signal by the first A/D converter(18).