| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas filter device capable of retaining an environment of high cleanliness by making a generation of dusts from a filter sheet even if a temperature is extremely varied. SOLUTION: In the gas filter device 10, the inside of a casing 40 is partitioned and formed to primary chambers 11 and secondary chambers 12 in the alternately superposed state by a filter plate 20. The gas filter device 10 has a flow-in port 13 at an upper surface side and a flow-out port 14 at a lower surface side. In the filter plate 20, a filter sheet 22 facing the primary chamber is backed-up by a support plate 21. The support plate 21 and spacers 25, 26 of the inlet port 13 and the outlet port 14 are formed by heat-resistant metals having a linear expansion coefficient of 10×10<-6> / deg.C at 0-400 deg.C.
|
