| 发明名称 |
Microactuator based on diamond |
| 摘要 |
The invention relates to a microactuator arranged on a thermally insulating layer (2) and having a resistance layer (4) made from doped diamond, which is provided with an electrical supply and an electrical leakage (9).
|
| 申请公布号 |
US6505914(B2) |
申请公布日期 |
2003.01.14 |
| 申请号 |
US20010011623 |
申请日期 |
2001.12.04 |
| 申请人 |
MERCKLE GMBH |
发明人 |
HOFER EBERHARD P.;KOHN ERHARD;REMBE CHRISTIAN;DER WIESCHE STEFAN AUS;GLUCHE PETER;LEUNER RUDIGER |
| 分类号 |
B81B1/00;F02M51/06;F02M63/00;H01L21/02;(IPC1-7):B41J2/05;H05B3/26 |
主分类号 |
B81B1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
