METHOD AND MECHANISM FOR CLEANING SLIT NOZZLE

摘要

PROBLEM TO BE SOLVED: To provide a method and a mechanism for cleaning a slit nozzle, by which a residual coating liquid which is solidifying now is completely removed without lowering work efficiency. SOLUTION: The slit nozzle tip part is cleaned by (1) jetting a cleaning liquid to the slit nozzle tip part from a jetting port of a 1st cleaning nozzle provided with the jetting port at an elevation angleθ1 at an under rear position to dissolve and remove the coating liquid now solidifying on the slit nozzle tip part and (2) jetting air from a jetting nozzle of a 2nd cleaning nozzle provided with the jetting port at an inclinationθ2 at an upper rear position to dry and remove the residual cleaning liquid.