Method for preparing a thermal pulsed micro flow senor

摘要

Disclosed is a method for preparing a thermal pulsed micro flow sensor comprising determining positions to allocate a plurality of thermal sensors along a microchannel, relatively to a heater positioned in said microchannel, and positioning said thermal sensors at the determined positions, respectively. In the invented flow sensor, the distance (Ln) between the thermal sensor (So) nearest to the thermal sensors (Sn) is determined according to the following equation:wherein DELTAF represents accuracy in velocity measurement; A represents cross sectional area of the fluid channel; Tn is flying time and Tn=(A*Ln)/F wherein F represents full scale of measurable velocity of no thermal sensor and n represents number of thermal sensor counting from the most downstream one; and AT represents tolerance of the thermal pulse signals;