发明名称 |
METHOD FOR REGULATING A COATING PROCESS |
摘要 |
The invention relates to a method for regulating a coating process enabling a coating to be applied to a substrate, whereby reliable, simple and low- surveillance determination and/or regulation of the coating to be applied is achieved when intensity of the light bundle falling upon the coated substrat e is determined after transmission and is included as an actual value for regulation of layer thickness.
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申请公布号 |
CA2303792(C) |
申请公布日期 |
2003.01.14 |
申请号 |
CA19982303792 |
申请日期 |
1998.09.04 |
申请人 |
STEAG HAMATECH AG |
发明人 |
WINDELN, WILBERT;SARBACHER, UWE |
分类号 |
G01B11/06;B05D3/06;C23C14/54;G11B7/26;(IPC1-7):G11B7/26 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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