发明名称 METHOD FOR REGULATING A COATING PROCESS
摘要 The invention relates to a method for regulating a coating process enabling a coating to be applied to a substrate, whereby reliable, simple and low- surveillance determination and/or regulation of the coating to be applied is achieved when intensity of the light bundle falling upon the coated substrat e is determined after transmission and is included as an actual value for regulation of layer thickness.
申请公布号 CA2303792(C) 申请公布日期 2003.01.14
申请号 CA19982303792 申请日期 1998.09.04
申请人 STEAG HAMATECH AG 发明人 WINDELN, WILBERT;SARBACHER, UWE
分类号 G01B11/06;B05D3/06;C23C14/54;G11B7/26;(IPC1-7):G11B7/26 主分类号 G01B11/06
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