发明名称 Semiconductor device
摘要 In order to provide a semiconductor device which has a bonding layer capable of providing electrical continuity between the cap and the semiconductor substrate, the semiconductor device comprises a semiconductor substrate whereon an element is formed on one principal plane thereof and a cap which hermetically seals the element so that a space is formed over the element, while the element is sealed by bonding a laminated bonding layer, which is formed around the element provided on the principal plane, and an Ni layer formed on the cap, wherein the laminated bonding layer is constituted from a first polysilicon layer which is doped with an impurity, an insulation layer and a second polysilicon layer which is not doped with an impurity, while the first polysilicon layer and the second polysilicon layer contact with each other in a part thereof so that the impurity diffuses through the contact area from the first polysilicon layer into the second polysilicon layer.
申请公布号 US6507103(B2) 申请公布日期 2003.01.14
申请号 US20020127711 申请日期 2002.04.23
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 YAMAGUCHI YASUO;NAKAMURA KUNIHIRO
分类号 G01P15/125;B81B7/00;B81C1/00;G01P1/02;G01P15/08;H01L23/00;H01L23/02;H01L23/04;H01L23/10;H01L29/84;(IPC1-7):H01L23/10 主分类号 G01P15/125
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