,申请号JP19940167674-传众专利搜索

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发明名称
摘要
申请公布号	JP3366116(B2)	申请公布日期	2003.01.14
申请号	JP19940167674	申请日期	1994.07.20
申请人		发明人
分类号	H01L21/28;H01L21/3205;H01L23/52;H01L29/78;(IPC1-7):H01L21/320	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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