发明名称 |
Ceramic substrate and process for producing the same |
摘要 |
An object of the present invention is to provide a ceramic substrate that is superior in heat uniformity and thermal shock resistance, and has a large chuck power in the case that the ceramic substrate is made to be an electrostatic chuck. The ceramic substrate of the present invention is a ceramic substrate comprising a conductor layer formed therein, characterized in that a section of the edge of the conductor layer is in a peaked shape.
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申请公布号 |
US6507006(B1) |
申请公布日期 |
2003.01.14 |
申请号 |
US20010869594 |
申请日期 |
2001.08.09 |
申请人 |
IBIDEN CO., LTD. |
发明人 |
HIRAMATSU YASUJI;ITO YASUTAKA |
分类号 |
B23Q3/15;H01L21/00;H01L21/66;H01L21/683;H05B3/12;H05B3/14;H05B3/18;H05B3/20;H05B3/26;H05B3/74;(IPC1-7):H05B3/68 |
主分类号 |
B23Q3/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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