Electrostatic force detector with cantilever for an electrostatic force microscope

摘要

An electrostatic force microscope wherein electrostatic force applied to the detector is determined through obtaining the field distribution on several different shaped detectors with the calculation of the voltage distribution near the detector with the Finite Element Method to direct the measurement of the absolute charge amount on surface under test so that one can define the differences between the analysis and the results from the parallel plate model. Of interest is how large the error in the charge detection occurs in conjunction with thickness change of dielectric materials to be tested. There is provided a detector with cantilever which has proper shape for the spatial resolution of 10mu made out of nickel foil for an electrostatic force microscope and the electrostatic force which appeared on it has been calculated.